会议背景介绍：
ICPT 2015 will be held at the Wild Horse Pass Hotel and Casino located in Chandler, Arizona from September 30-October 2, 2015.
ICPT 2015 is jointly hosted by CMP User’s Group of the Northern California Chapter of the American Vacuum Society and the Clarkson University Center for Advanced Materials Processing (CAMP). The conference will provide an international forum for academic researchers, industrial practitioners and engineers from around the world for the exchange of information on state-of-the-art research in CMP technology. ICPT 2015 promotes the exchange of opportunities, ideas, friendly relationships and research collaboration.
We look forward to seeing you at ICPT 2015 and welcoming you to the beautiful Wild Horse Pass Hotel and Casino in sunny Chandler, Arizona.
征文范围及要求：
Abstracts of original work are requested on the following topics:
Front end and back end CMP applications
Process integration, control & reliability
Consumables, equipment and metrology
Defects and Post CMP cleaning
CMP fundamentals, modeling and simulation
3D ICs/TSV applications
CMP for MEMS
Environmental issues related to CMP
Emerging technologies in CMP
Alternative planarization technologies
